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Software electron counting for low-dose scanning transmission electron microscopy.

Andreas Mittelberger1, Christian Kramberger1, Jannik C Meyer1

  • 1Faculty of physics, University of Vienna, Boltzmanngasse 5, Vienna, 1090, Austria.

Ultramicroscopy
|February 27, 2018
PubMed
Summary
This summary is machine-generated.

We developed software to correct fast scan artifacts in transmission electron microscopy (TEM). This enables high-speed, low-dose imaging with electron counting, preserving image quality.

Keywords:
Electron countingLow-doseSTEMSingle electron signal

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Area of Science:

  • Electron microscopy
  • Materials science
  • Physics

Background:

  • Detector performance is crucial for low-dose imaging in transmission electron microscopy (TEM).
  • Achieving single-electron counting is the ultimate goal for high-fidelity imaging.
  • Fast scanning in scanning TEM (STEM) enables low-dose imaging but introduces artifacts and reduces resolution.

Purpose of the Study:

  • To develop a software-based method for correcting scan artifacts in STEM.
  • To enable high-speed, low-dose imaging in STEM without compromising image quality.
  • To convert raw images into accurate electron counts.

Main Methods:

  • A software approach was developed utilizing scintillator and photomultiplier response over multiple pixels.
  • Correction parameters were directly extracted from raw image data.
  • The method allows for the conversion of corrected images into electron counts.

Main Results:

  • The developed software effectively corrects artifacts introduced by fast scanning in STEM.
  • Image quality comparable to slower, artifact-free scans is retained.
  • The approach facilitates the conversion of images into electron counts, enabling quantitative analysis.

Conclusions:

  • This software approach enables artifact-free, low-dose imaging in STEM at high scan speeds.
  • The method preserves image quality and allows for electron counting, advancing quantitative microscopy.
  • It overcomes limitations of fast scanning, making high-resolution, low-dose STEM more accessible.