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Precise Nanoscale Measurements with Scanning Probe Microscopy (SPM): A Review

Zongmin Ma, Min Zhao, Zhang Qu

    Journal of Nanoscience and Nanotechnology
    |April 12, 2018
    PubMed
    Summary

    Scanning Probe Microscopy (SPM) is crucial for precise micro/nano measurements. This review details SPM principles, advancements, and applications in nano-/micro-electro-mechanical systems (NEMS/MEMS) for high-resolution imaging and metrology.

    Keywords:
    Scanning Probe MicroscopyAtomic Force MeasurementOptical InterferenceCantilever

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