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Obtaining 3D Chemical Maps by Energy Filtered Transmission Electron Microscopy Tomography

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In lens BSE detector with energy filtering.

Tomáš Radlička¹, Marek Unčovský², Martin Oral¹

¹Institute of Scientific Instruments of the CAS, v. v. i., Královopolská 147, Brno 612 64, Czech Republic.

Ultramicroscopy

|April 13, 2018

Summary

A new in-lens detector for electron microscopes features high-pass energy filtering. This enables detection of low-loss backscattered electrons, significantly improving imaging resolution for biological samples.

Keywords:

Back scattered electrons Electron optics Energy filtering Scanning electron microscopy

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Area of Science:

Electron microscopy
Materials science
Biological imaging

Background:

Standard electron detectors face limitations in capturing low-energy electrons.
Backscattered electrons near primary beam energy are crucial for high-resolution imaging.
Thermo Fisher Scientific (FEI) electron microscopes with Elstar columns require specialized detection methods.

Purpose of the Study:

To introduce a novel in-lens detector for electron microscopes.
To enable the detection of low-loss backscattered electrons.
To enhance imaging resolution in biological samples.

Main Methods:

Development of an in-lens detector with high-pass energy filtering.
Integration and testing of the detector with Thermo Fisher Scientific (FEI) electron microscopes (Elstar column).
Application in imaging a biological sample.

Main Results:

The detector successfully captures low-loss backscattered electrons.
High-pass energy filtering is a key enabling feature.
Significant resolution improvement was observed in biological sample imaging.

Conclusions:

The new in-lens detector offers enhanced capabilities for electron microscopy.
High-pass energy filtering is effective for detecting low-energy electrons.
This technology provides a substantial benefit for high-resolution biological imaging.