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Updated: Feb 12, 2026

Obtaining 3D Chemical Maps by Energy Filtered Transmission Electron Microscopy Tomography
Published on: June 9, 2018
In lens BSE detector with energy filtering
Tomáš Radlička1, Marek Unčovský2, Martin Oral1
1Institute of Scientific Instruments of the CAS, v. v. i., Královopolská 147, Brno 612 64, Czech Republic.
Abstract:
We present a new type of an in-lens detector designed for Thermo Fisher Scientific (FEI) electron microscopes with the Elstar column. A key feature of it is high-pass energy filtering to enable the detection of low-loss backscattered electrons with their energy close to the primary beam energy. We show an application of the detector in imaging of a biological sample where the signal from these electrons leads to a significant improvement in resolution.
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