High spatial resolution detection of low-energy electrons using an event-counting method, application to point

Evelyne Salançon1, Alain Degiovanni1, Laurent Lapena1

  • 1Aix Marseille University, CNRS, CINAM UMR 7325, F-13288 Marseille, France.

Summary

A new event-counting method enhances electron microscopy resolution by 7 times. This technique improves detector spatial resolution, paving the way for atomic-level imaging in electron point projection microscopy.

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