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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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Systematic-error-free wavefront measurement using an X-ray single-grating interferometer.

Takato Inoue1, Satoshi Matsuyama1, Shogo Kawai1

  • 1Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.

The Review of Scientific Instruments
|May 3, 2018
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Summary
This summary is machine-generated.

This study identified and eliminated systematic errors in X-ray Talbot interferometry caused by X-ray cameras. Accurate wavefront error measurements were achieved for multilayer focusing mirrors, improving precision in X-ray optics analysis.

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Area of Science:

  • Optics
  • X-ray Interferometry
  • Metrology

Background:

  • X-ray interferometers utilizing the Talbot effect are crucial for high-resolution imaging.
  • Systematic errors, particularly from X-ray cameras, can limit measurement accuracy.
  • Accurate characterization of optical components like multilayer mirrors is essential for advanced X-ray applications.

Purpose of the Study:

  • To investigate and quantify systematic errors in X-ray Talbot interferometers.
  • To develop a method for eliminating camera-induced systematic errors.
  • To demonstrate accurate wavefront error measurements of large numerical aperture multilayer focusing mirrors.

Main Methods:

  • Detailed investigation of systematic errors in an X-ray single-grating interferometer.
  • Identification of errors originating from the X-ray camera.
  • Development and application of a novel error elimination technique.
  • Demonstration using multilayer focusing mirrors at the SPring-8 Angstrom Compact free electron Laser (SCARF).

Main Results:

  • Non-negligible systematic errors induced by the X-ray camera were identified.
  • A method to eliminate these systematic errors was successfully proposed and implemented.
  • Systematic-error-free wavefront error measurements were achieved.
  • Wavefront aberration measurements using two different cameras showed consistency within an accuracy of better than λ/12.

Conclusions:

  • Systematic errors in X-ray Talbot interferometry can be effectively identified and mitigated.
  • The proposed method enables highly accurate wavefront error measurements of advanced X-ray optical elements.
  • This advancement is critical for the development and application of high-numerical-aperture X-ray optics.