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Published on: January 20, 2023
Annular dark-field scanning confocal electron microscopy studied using multislice simulations
Takumi Hamaoka1, Chih-Yu Jao1, Masaki Takeguchi1
1Transmission Electron Microscopy Station, National Institute for Materials Science, Tsukuba 305-0047, Japan.
Abstract:
Annular dark-field scanning confocal electron microscopy (ADF-SCEM) has been studied using multislice simulations. Thermal diffuse scattering was considered in the calculations. Geometric aberrations of the lenses were introduced. A finite-sized pinhole was taken into consideration, in addition to an ideal point pinhole. ADF-SCEM images of Al crystals aligned along a zone-axis exhibit elongated contrast along the optic axis. Results of simulations suggest that if geometric aberrations of an imaging lens are corrected, depth resolution in ADF-SCEM can be improved by employing a large collection semi-angle of an annular aperture, even with a finite pinhole.
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