Related Experiment Video
Updated: Feb 9, 2026
12:26
Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics
Published on: August 27, 2013
18.0K
Development of ball surface acoustic wave trace moisture analyzer using burst waveform undersampling circuit.
Toshihiro Tsuji1, Toru Oizumi2, Hideyuki Fukushi2
1Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan.
The Review of Scientific Instruments
|June 6, 2018
Summary
A new burst waveform undersampling (BUS) circuit enables precise temperature compensation for ball surface acoustic wave (SAW) trace moisture analyzers (TMAs). This cost-effective TMA achieves rapid, reliable measurements comparable to cavity ring-down spectroscopy (CRDS) systems.
Area of Science:
- Materials Science
- Sensor Technology
- Analytical Chemistry
Background:
- Trace moisture measurement below 1 ppmv is critical for semiconductor yield and reliability.
- Surface acoustic wave (SAW) sensors offer potential for trace moisture analysis but require precise temperature compensation.
- Existing two-frequency measurement (TFM) for temperature compensation is effective but costly.
Purpose of the Study:
- To develop a cost-effective circuit for precise temperature compensation in SAW-based trace moisture analyzers (TMAs).
- To prototype and validate a ball SAW TMA utilizing a novel burst waveform undersampling (BUS) circuit.
- To compare the performance of the developed TMA against a cavity ring-down spectroscopy (CRDS) system.
Main Methods:
- Development of a burst waveform undersampling (BUS) circuit based on undersampling measurement theory.
- Prototyping a ball SAW TMA with a sol-gel silica coating.
- Calibration of the BUS-based TMA against a cavity ring-down spectroscopy (CRDS) trace moisture analyzer.
- Evaluation of response time and detection limit at -80 °CFP.
Main Results:
- The BUS circuit effectively compensated for temperature drift in the SAW sensor's delay time.
- The prototyped ball SAW TMA demonstrated comparable concentration measurements to the CRDS TMA.
- The SAW TMA exhibited approximately half the response time of the CRDS TMA, measuring moisture within 1 minute.
- A detection limit of 0.05 ppbv was achieved, comparable to CRDS.
Conclusions:
- A practical and cost-effective ball SAW TMA can be realized using the developed BUS circuit.
- The BUS circuit offers a viable solution for precise temperature compensation in SAW sensors for trace moisture analysis.
- This technology presents a promising alternative for high-precision, rapid trace moisture monitoring in sensitive industrial applications.
Related Concept Videos
01:07Effective Value of a Periodic Waveform
1.2K
The concept of effective value, the root mean square (RMS) value, is crucial in understanding electrical circuits and power delivery. This idea emerges from the necessity to measure the effectiveness of a voltage or current source in supplying power to a resistive load.
The effective value of a periodic current represents the direct current (DC) that conveys the same average power to a resistor as the periodic current itself. This concept is crucial when assessing AC circuits. To determine the...
The effective value of a periodic current represents the direct current (DC) that conveys the same average power to a resistor as the periodic current itself. This concept is crucial when assessing AC circuits. To determine the...
1.2K
01:10Moisture Content and Bulking of Aggregate
476
The moisture content of aggregates is a crucial factor in construction, particularly in concrete mixing, as it influences the total water required in the mix. Moisture content represents the water coated on the exterior surface of the aggregate existing in a saturated and surface-dry condition. The total water content of a moist aggregate is the sum of its moisture content and water absorption.
When aggregates are exposed to rain or sit in stockpiles, they absorb moisture, which must be...
When aggregates are exposed to rain or sit in stockpiles, they absorb moisture, which must be...
476
02:12The Wave Nature of Light
61.6K
The nature of light has been a subject of inquiry since antiquity. In the seventeenth century, Isaac Newton performed experiments with lenses and prisms and was able to demonstrate that white light consists of the individual colors of the rainbow combined together. Newton explained his optics findings in terms of a "corpuscular" view of light, in which light was composed of streams of extremely tiny particles traveling at high speeds according to Newton's laws of motion.
61.6K
01:17Second-Order Circuits
3.6K
Integrating two fundamental energy storage elements in electrical circuits results in second-order circuits, encompassing RLC circuits and circuits with dual capacitors or inductors (RC and RL circuits). Second-order circuits are identified by second-order differential equations that link input and output signals.
Input signals typically originate from voltage or current sources, with the output often representing voltage across the capacitor and/or current through the inductor. For example, in...
Input signals typically originate from voltage or current sources, with the output often representing voltage across the capacitor and/or current through the inductor. For example, in...
3.6K
01:10Wave Parameters
9.4K
The simplest mechanical waves are associated with simple harmonic motion and repeat themselves for several cycles. These simple harmonic waves can be modeled using a combination of sine and cosine functions. Consider a simplified surface water wave that moves across the water's surface. Unlike complex ocean waves, in surface water waves, water moves vertically, oscillating up and down, whereas the disturbance of the wave moves horizontally through the medium. If a seagull is floating on the...
9.4K
01:07Reflection of Waves
4.7K
When a wave travels from one medium to another, it gets reflected at the boundary of the second medium. A common example of this is when a person yells at a distance from a cliff and hears the echo of their voice. The sound waves (longitudinal waves) traveling in the air are reflected from the bounding cliff. Similarly, flipping one end of a string whose other end is tied to a wall causes a pulse (transverse wave) to travel through the string, which gets reflected upon reaching the wall. In...
4.7K