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Determining EDS and EELS partial cross-sections from multiple calibration standards to accurately quantify

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  • 1Department of Materials, University of Oxford, Parks Road, OX1 3PH, UK.

Micron (Oxford, England : 1993)
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Summary

This study introduces a robust method for combining Atomic Resolution Scanning Transmission Electron Microscopy (STEM) signals like Energy-Dispersive X-ray Spectroscopy (EDS) and Electron Energy Loss Spectroscopy (EELS). This approach enables accurate atom-counting in multi-element samples.

Keywords:
ADFEDSEELSQuantitative spectroscopySTEM

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Characterizing multi-element samples like Pt-Co nanoparticles in STEM requires advanced spectroscopic techniques.
  • Conventional techniques struggle to decouple composition and mass-thickness effects, hindering accurate atom-counting.
  • Simultaneous acquisition of ADF, EDS, and EELS signals is now possible, but quantification methods lack standardization and self-consistency.

Purpose of the Study:

  • To develop a robust approach for measuring and combining ADF, EDS, and EELS signals.
  • To standardize quantification units for improved interpretation and accuracy in multi-element sample analysis.
  • To enable accurate atom-counting in thin, multi-element samples.

Main Methods:

  • Utilized needle and nanoparticle standards for signal quantification.
  • Employed a robust approach for measuring and combining ADF, EDS, and EELS signals.
  • Quantified signals in units of partial scattering cross-section for consistent interpretation.

Main Results:

  • Successfully measured and combined ADF, EDS, and EELS signals using defined standards.
  • Quantification in partial scattering cross-section units demonstrated self-consistency.
  • The developed method enables accurate atom-counting of multi-element samples.

Conclusions:

  • The presented robust approach provides a standardized and self-consistent method for quantifying spectroscopic signals in STEM.
  • Using partial scattering cross-section as a unit facilitates easier interpretation of emitted signals.
  • This technique significantly improves the accuracy of atom-counting in complex multi-element nanomaterials.