Determining EDS and EELS partial cross-sections from multiple calibration standards to accurately quantify...

Spectroscopic signals such as EDS and EELS provide an effective way of characterising multi-element samples such as Pt-Co nanoparticles in STEM. The advantage of spectroscopy over imaging is the ability to decouple composition and mass-thickness effects for thin samples, into the number of various types of atoms in a sample. This is currently not possible for multi element samples using conventional ADF quantification techniques alone. With recent developments in microscope hardware and software, it is now possible to acquire the ADF, EDS and EELS signals simultaneously and at high speed. However, the methods of quantifying the signals emitted from the sample vary greatly. Most approaches use pure-element standards in the form of needles, nanoparticles and wedges to quantify the spectroscopic signal into either partial scattering cross-sections, zeta-factors or k-factors. But self-consistency between the different methods has not been verified and the units of the quantification are not standardised. We present a robust approach for measuring and combining ADF, EDS and EELS signals using needle and nanoparticle standards in units of the partial scattering cross-section. The partial scattering cross-section allows an easy interpretation of the signals emitted from the sample and enables accurate atom-counting of the sample.