Fourier transform infrared spectrometer based on an electrothermal MEMS mirror
Applied Optics
|August 18, 2018
Summary
A novel micro Fourier transform infrared spectrometer (μFTIR) utilizes a microelectromechanical systems (MEMS) mirror for accurate soybean composition analysis. This device precisely measures moisture, protein, and fat content in grains.
Area of Science:
- Spectroscopy
- Microelectromechanical Systems (MEMS)
Background:
- Traditional Fourier transform infrared spectrometers can be bulky and expensive.
- Miniaturization of spectroscopic instruments is crucial for portable and field applications.
Purpose of the Study:
- To develop a compact and cost-effective micro Fourier transform infrared spectrometer (μFTIR).
- To demonstrate the μFTIR's capability for analyzing soybean composition.
Main Methods:
- An H-shaped electrothermal microelectromechanical systems (MEMS) mirror was designed and fabricated.
- A specialized driving method ensured linear motion of the MEMS mirror.
- A telecentric lens and a new phase interpolation algorithm were integrated to enhance spectral stability and accuracy.
Main Results:
- The μFTIR achieved a linear, uniform-speed motion of the MEMS mirror without complex closed-loop control.
- The system demonstrated reduced influence from MEMS mirror tilting.
- Accurate measurements of soybean moisture, protein, and fat content were achieved.
Conclusions:
- The developed μFTIR is a viable tool for rapid and accurate on-site analysis of agricultural products.
- The integration of MEMS technology and advanced algorithms offers a promising direction for portable spectroscopic devices.
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