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Updated: Feb 3, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device

Néstor N Peña-García1, Luz A Aguilera-Cortés2, Max A González-Palacios3

  • 1Departamento de Ingeniería Mecánica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle de Santiago km 3.5 + 1.8 km, Palo Blanco, Salamanca, Guanajuato 36885, Mexico. nnpg10@hotmail.com.

Sensors (Basel, Switzerland)
|October 24, 2018
PubMed

Keywords:
FEM modelSandia Ultra-Planar Multi-level MEMS Technology V (SUMMiT V) fabrication processcapacitive microphonedual backplateelectret condenser microphonesspring-supported diaphragm

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