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Max Kneiß1, Philipp Storm1, Gabriele Benndorf1

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Summary

This study introduces a novel pulsed laser deposition (PLD) method using a segmented target to create vertically composition-graded ternary alloy thin films. This technique enables precise control over film composition for advanced device applications.

Keywords:
composition controlpulsed laser depositionstep gradingternary alloy systemthin films

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Area of Science:

  • Materials Science
  • Thin Film Deposition
  • Semiconductor Physics

Background:

  • Vertical composition gradients in ternary alloy thin films are crucial for advanced device structures.
  • Standard pulsed laser deposition (PLD) systems have limitations in achieving such vertical gradients.

Purpose of the Study:

  • To develop a new PLD approach for the epitaxial growth of vertically composition-graded thin films.
  • To demonstrate the feasibility of this method using the MgₓZn₁₋ₓO alloy system.

Main Methods:

  • Utilized a single elliptically segmented PLD target.
  • Varied film composition by adjusting the laser spot position on the target.
  • Epitaxial growth of vertically graded MgₓZn₁₋ₓO thin films.

Main Results:

  • Achieved high optical quality vertically composition-graded MgₓZn₁₋ₓO thin films.
  • Demonstrated well-defined Mg-content in each layer with no interdiffusion.
  • Successfully deposited homogeneous thin films with desired cation compositions.

Conclusions:

  • The proposed PLD method with a segmented target is effective for creating vertically graded alloy thin films.
  • This technique offers precise compositional control and maintains high optical and structural quality.
  • The method is versatile for depositing various homogeneous and graded thin films.