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Updated: Feb 3, 2026

Split Point Analysis and Uncertainty Quantification of Thermal-Optical Organic/Elemental Carbon Measurements
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Uncertainty Quantification of Microstructure-Governed Properties of Polysilicon MEMS

Ramin Mirzazadeh1, Stefano Mariani2

  • 1Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy. ramin.mirzazadeh@polimi.it.

Micromachines
|November 8, 2018
PubMed

Keywords:
coupled electromechanical analysismicroelectromechanical systems (MEMS)parameter identificationpolysiliconstochastic effects

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