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Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface

Adam Inzelberg1, Yoav Linzon2

  • 1School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv 69978, Israel. adam@mail.tau.ac.il.

Micromachines
|November 8, 2018
PubMed

Keywords:
interference spectroscopylocal stress evaluationoptomechanicsthin films

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