Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics.

Area of Science:

• Optoelectronics
• Microelectromechanical Systems (MEMS)

Background:

• Optical switches are crucial for managing light in integrated photonic circuits.
• Existing MEMS-based optical switches often face challenges with optical loss and precise control.

Purpose of the Study:

• To develop and demonstrate a novel laterally rotating micromachined platform for in-plane light control within optical waveguides.
• To achieve low and constant optical losses across the device's motion range.
• To integrate this platform with silicon nitride waveguides for a functional optical switch.

Main Methods:

• A laterally rotating micromachined platform actuated electrostatically via a circular comb drive was designed and fabricated.
• A gap-closing mechanism was implemented to minimize optical losses between moving and fixed components.
• A latching structure was incorporated for precise angular positioning.
• The platform was integrated with silicon nitride waveguides to form a crossbar switch.

Main Results:

• Demonstrated angular motion of ±9.5° at 180 V.
• Achieved submicron air gaps using the gap-closing mechanism to reduce optical losses.
• Implemented a latch structure with 0.25° resolution for stable positioning.
• Reported preliminary optical measurements: 14.8 dB loss in the bar state and 12.2 dB in the cross state (with gap closed).

Conclusions:

• This work presents the first reported optical switch utilizing a rotating microelectromechanical device integrated with silicon nitride waveguides.
• The developed device offers a promising solution for efficient and precise light control in optical systems.
• The demonstrated low optical losses and high positioning accuracy highlight the potential for advanced optical routing applications.