Related Experiment Video
Updated: Feb 2, 2026
04:45
Non-plasma Bonding of PDMS for Inexpensive Fabrication of Microfluidic Devices
Published on: November 1, 2007
35.0K
A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device
Zhen Zhu1, Pan Chen2, Kegang Liu3
1Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing 210096, China. zhuzhen@seu.edu.cn.
Micromachines
|November 9, 2018
Summary
A novel, irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8 was developed using surface functionalization and heat. This technique enables robust PDMS-SU-8 integration for advanced microfluidic devices.
Area of Science:
- Materials Science
- Surface Chemistry
- Microfluidics Engineering
Background:
- Poly(dimethylsiloxane) (PDMS) and SU-8 are widely used materials in microfluidics and microfabrication.
- Achieving irreversible and reliable bonding between PDMS and SU-8 remains a challenge for complex device integration.
Purpose of the Study:
- To develop a versatile and irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8.
- To demonstrate the application of this bonding method in creating functional hybrid microfluidic devices.
Main Methods:
- Surface activation of PDMS using oxygen plasma or corona treatment.
- Functionalization of both PDMS and SU-8 with (3-aminopropyl)triethoxysilane (APTES).
- Covalent bonding achieved by heating the functionalized surfaces.
Main Results:
- Characterization confirmed covalent coupling via epoxide opening and dehydration reactions.
- Tensile and leakage tests demonstrated a bonding strength exceeding 1.4 MPa.
- Successful fabrication of a metal-SU-8-PDMS hybrid device for microparticle manipulation.
Conclusions:
- The developed method provides a robust and versatile approach for irreversible PDMS-SU-8 bonding.
- This technique facilitates the integration of microfluidic structures and microelectrodes for complex device functionalities.
- The hybrid fabrication approach enables multifunctional integration in microfluidic systems.
Related Concept Videos
02:51Metal-Ligand Bonds
24.3K
The hemoglobin in the blood, the chlorophyll in green plants, vitamin B-12, and the catalyst used in the manufacture of polyethylene all contain coordination compounds. Ions of the metals, especially the transition metals, are likely to form complexes.
In these complexes, transition metals form coordinate covalent bonds, a kind of Lewis acid-base interaction in which both of the electrons in the bond are contributed by a donor (Lewis base) to an electron acceptor (Lewis acid). The Lewis acid in...
In these complexes, transition metals form coordinate covalent bonds, a kind of Lewis acid-base interaction in which both of the electrons in the bond are contributed by a donor (Lewis base) to an electron acceptor (Lewis acid). The Lewis acid in...
24.3K
02:49Bond Energies and Bond Lengths
31.5K
Stable molecules exist because covalent bonds hold the atoms together. The strength of a covalent bond is measured by the energy required to break it, that is, the energy necessary to separate the bonded atoms. Separating any pair of bonded atoms requires energy — the stronger a bond, the greater the energy required to break it.
31.5K
02:43Peptide Bonds
83.0K
A peptide bond covalently attaches amino acids through a dehydration reaction. One amino acid's carboxyl group and another amino acid's amino group combine, releasing a water molecule. The resulting bond is the peptide bond. The products that such linkages form are peptides. As more amino acids join this growing chain, the resulting chain is a polypeptide. Each polypeptide has a free amino group at one end. This end has the N-terminal, or the amino-terminal, and the other end has a free...
83.0K
02:32Bonding in Metals
52.4K
Metallic bonds are formed between two metal atoms. A simplified model to describe metallic bonding has been developed by Paul Drüde called the “Electron Sea Model”.
52.4K
00:42Ionic Bonds
130.8K
Overview
When atoms gain or lose electrons to achieve a more stable electron configuration they form ions. Ionic bonds are electrostatic attractions between ions with opposite charges. Ionic compounds are rigid and brittle when solid and may dissociate into their constituent ions in water. Covalent compounds, by contrast, remain intact unless a chemical reaction breaks them.
Opposing Charges Hold Ions Together in Ionic Compounds
Ionic bonds are reversible electrostatic interactions between ions...
When atoms gain or lose electrons to achieve a more stable electron configuration they form ions. Ionic bonds are electrostatic attractions between ions with opposite charges. Ionic compounds are rigid and brittle when solid and may dissociate into their constituent ions in water. Covalent compounds, by contrast, remain intact unless a chemical reaction breaks them.
Opposing Charges Hold Ions Together in Ionic Compounds
Ionic bonds are reversible electrostatic interactions between ions...
130.8K
02:45Valence Bond Theory
50.2K
Overview of Valence Bond Theory
50.2K