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Updated: Feb 2, 2026

Non-plasma Bonding of PDMS for Inexpensive Fabrication of Microfluidic Devices

Non-plasma Bonding of PDMS for Inexpensive Fabrication of Microfluidic Devices

Published on: November 1, 2007

A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device.

Zhen Zhu¹, Pan Chen², Kegang Liu³

¹Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing 210096, China. zhuzhen@seu.edu.cn.

|November 9, 2018

Summary

A novel, irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8 was developed using surface functionalization and heat. This technique enables robust PDMS-SU-8 integration for advanced microfluidic devices.

Keywords:

PDMS SU-8 bonding cell trapping impedance measurement microfluidics multifunctional integration negative dielectrophoretic (nDEP)

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Last Updated: Feb 2, 2026

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Published on: November 1, 2007

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PDMS Device Fabrication and Surface Modification

PDMS Device Fabrication and Surface Modification

Published on: October 1, 2007

Area of Science:

Materials Science
Surface Chemistry
Microfluidics Engineering

Background:

Poly(dimethylsiloxane) (PDMS) and SU-8 are widely used materials in microfluidics and microfabrication.
Achieving irreversible and reliable bonding between PDMS and SU-8 remains a challenge for complex device integration.

Purpose of the Study:

To develop a versatile and irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8.
To demonstrate the application of this bonding method in creating functional hybrid microfluidic devices.

Main Methods:

Surface activation of PDMS using oxygen plasma or corona treatment.
Functionalization of both PDMS and SU-8 with (3-aminopropyl)triethoxysilane (APTES).
Covalent bonding achieved by heating the functionalized surfaces.

Main Results:

Characterization confirmed covalent coupling via epoxide opening and dehydration reactions.
Tensile and leakage tests demonstrated a bonding strength exceeding 1.4 MPa.
Successful fabrication of a metal-SU-8-PDMS hybrid device for microparticle manipulation.

Conclusions:

The developed method provides a robust and versatile approach for irreversible PDMS-SU-8 bonding.
This technique facilitates the integration of microfluidic structures and microelectrodes for complex device functionalities.
The hybrid fabrication approach enables multifunctional integration in microfluidic systems.