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A New XYZ Compliant Parallel Mechanism for Micro-/Nano-Manipulation: Design and Analysis.

Haiyang Li1, Guangbo Hao2, Richard C Kavanagh3

  • 1School of Engineering-Electrical and Electronic Engineering, University College Cork, Cork, Ireland. haiyang.li@umail.ucc.ie.

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|November 9, 2018
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Summary

This study introduces a novel symmetrical XYZ compliant parallel mechanism (CPM) with excellent motion control, minimizing cross-axis coupling and lost motion for precision applications.

Keywords:
analytical modelingcompliant parallel mechanismconceptual designkinematic analysismicro-/nano-manipulationpractical design

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Area of Science:

  • Mechanical Engineering
  • Robotics
  • Mechatronics

Background:

  • Compliant parallel mechanisms (CPMs) are crucial for high-precision motion systems.
  • Existing CPM designs often face challenges with cross-axis coupling, lost motion, and parasitic movements.
  • The constraint and position identification (CPI) approach offers a framework for designing advanced CPMs.

Purpose of the Study:

  • To propose a new, fully-symmetrical XYZ CPM with superior motion characteristics.
  • To achieve reduced cross-axis coupling, minimized lost motion, and small parasitic motion.
  • To provide a validated analytical model for quick design synthesis and discuss practical manufacturing schemes.

Main Methods:

  • Utilizing the constraint and position identification (CPI) approach for synthesis.
  • Conducting comprehensive kinematic analysis via finite element simulations.
  • Deriving and validating nonlinear analytical models for primary translations.
  • Discussing practical design schemes focusing on manufacturability.

Main Results:

  • The proposed XYZ CPM exhibits a maximum cross-axis coupling rate <0.86% and lost motion rate <1.20%.
  • Parasitic rotations of the motion stage (MS) are on the order of 10-5 rad.
  • Parasitic translations of the actuated stages (ASs) are <0.3% of the motion range for beams with slenderness ratio >20.

Conclusions:

  • The novel symmetrical XYZ CPM demonstrates excellent motion characteristics due to its design and rigid linkages.
  • Validated analytical models facilitate rapid design synthesis.
  • Practical designs enable applications in micro-/nano-positioning, manufacturing, and assembly, with a presented high-precision translational system.