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Updated: Feb 2, 2026

Evaluating the Electrochemical Properties of Supercapacitors using the Three-Electrode System
Published on: January 7, 2022
Micromachined Planar Supercapacitor with Interdigital Buckypaper Electrodes
Yun-Ting Chen1, Cheng-Wen Ma2, Chia-Ming Chang3
1Department of Mechanical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan. ytchen@mems.me.ntu.edu.tw.
This study presents a flexible micro-supercapacitor using buckypaper electrodes fabricated via a simple vacuum filtration method. The device demonstrates excellent flexibility, high specific capacitance (107.27 mF/cm²), and stable performance over 1000 cycles.
Area of Science:
- Materials Science
- Electrochemistry
- Nanotechnology
Background:
- Flexible electronics require advanced energy storage solutions.
- Micro-supercapacitors offer compact and efficient power options.
- Buckypaper electrodes provide unique electrochemical properties.
Purpose of the Study:
- To develop a flexible micro-supercapacitor with interdigital planar buckypaper electrodes.
- To investigate a simple fabrication process for these devices.
- To evaluate the electrochemical performance and stability of the flexible micro-supercapacitors.
Main Methods:
- Fabrication of in-plane interdigital buckypaper electrodes using vacuum filtration and SU-8 molding.
- Cyclic voltammetry to measure specific capacitance.
- Charge-discharge tests to assess electrochemical stability and cycle life.
- Electrochemical impedance spectroscopy (Nyquist plot) to determine equivalent series resistance.
Main Results:
- Achieved a maximum specific capacitance of 107.27 mF/cm² at 20 mV/s.
- Demonstrated linear increase in specific capacitance with buckypaper electrode thickness.
- Exhibited high cycle stability with 96.59% retention after 1000 cycles.
- Measured a low leakage current of approximately 9.95 µA after 3600 s.
- Obtained an equivalent series resistance of approximately 18 Ω.
Conclusions:
- The proposed fabrication method yields flexible micro-supercapacitors with excellent performance.
- The devices are suitable for integration into flexible electronic systems.
- Buckypaper electrodes offer a promising material for advanced energy storage applications.
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