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A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

Agin Vyas1, Henrik Staaf2, Cristina Rusu3

  • 1Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41258 Gothenburg, Sweden. agin@chalmers.se.

Micromachines
|November 15, 2018
PubMed

Keywords:
bandwidth broadeningcoupled cantileversenhanced stress distributionfinite element modelinglead zirconate titanatemicroelectromechanical systems (MEMS)piezoelectric micro-energy harvester

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