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Updated: Feb 2, 2026

In Situ Characterization of Hydrated Proteins in Water by SALVI and ToF-SIMS
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Quantitative Aspects of PLAD Sidewall Doping Characterization by SIMS and APT

Dimitry Kouzminov1, James Cournoyer1, Somchintana Norasetthekul1

  • 11Varian Semiconductor Equipment Division,Applied Materials Inc.,35 Dory Road, Gloucester, MA 01930,USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|November 15, 2018
PubMed

Keywords:
APTPLADSIMSdopant

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