Improved pH Sensitivity and Reliability for Extended Gate Field-Effect Transistor Sensors Using High-k Sensing

Joo-Won Kang1, Won-Ju Cho1

  • 1Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-Gu, Seoul 01897, Republic of Korea.

Summary

This study developed dual-gate field-effect transistor (FET) pH sensors. Tantalum oxide (Ta₂O₅) membranes achieved high sensitivity (478 mV/pH), surpassing the Nernst limit for biosensor applications.

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