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Updated: Feb 2, 2026

Transcription Start Site Mapping Using Super-low Input Carrier-CAGE
Published on: June 26, 2019
From EBIC images to qualitative minority carrier diffusion length maps
1ISAE, Université de Toulouse, Image Sensor Research Team, 10 avenue E.Belin, F-31055 Toulouse, France.
Abstract:
A novel method is presented with the aim to perform minority carrier diffusion length map on cross-sectional samples. The method is based on one Electron-Beam Induced Current (EBIC) acquisition and on the analyze of the EBIC signal slope variation on each scanned points. This method is applied on a pinned photodiode array realized on a low doped silicon epitaxy, and the electron diffusion length map which is extracted is in good accordance with our expectation taking into account the doping distribution of the device. A TCAD simulation also confirms quantitatively the measured diffusion length map. Advantages and drawbacks of this method are discussed in this study.
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