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Updated: Feb 1, 2026

Tools for Surface Treatment of Silicon Planar Intracortical Microelectrodes
Published on: June 8, 2022
Extracellular matrix-based intracortical microelectrodes: Toward a microfabricated neural interface based on natural
Wen Shen1,2, Lohitash Karumbaiah3, Xi Liu4
1Institute for Electronics and Nanotechnology, Georgia Institute of Technology, Atlanta, GA 30332, USA.
Abstract:
Extracellular matrix (ECM)-based implantable neural electrodes (NEs) were achieved using a microfabrication strategy on natural-substrate-based organic materials. The ECM-based design minimized the introduction of non-natural products into the brain. Further, it rendered the implants sufficiently rigid for penetration into the target brain region and allowed them subsequently to soften to match the elastic modulus of brain tissue upon exposure to physiological conditions, thereby reducing inflammatory strain fields in the tissue. Preliminary studies suggested that ECM-NEs produce a reduced inflammatory response compared with inorganic rigid and flexible approaches. In vivo intracortical recordings from the rat motor cortex illustrate one mode of use for these ECM-NEs.
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