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Updated: Jan 31, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
A weighted rebinned backprojection-filtration algorithm from partially beam-blocked data for a single-scan cone-beam
Jonghwan Min1, Rizza Pua1, Changhwan Kim1
1Department of Nuclear and Quantum Engineering, Korea Advanced Institute of Science and Technology(KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.
Purpose:
Scatter contamination constitutes a dominant source of degradation of image quality in cone-beam computed tomography (CBCT). We have recently developed an analytic image reconstruction method with a scatter correction capability from the partially blocked cone-beam data out of a single scan. Despite its easy implementation and its computational efficiency, the developed method may result in additional image artifacts for a large cone angle geometry due to data inconsistency. To improve the image quality at a large cone angle, we propose a weighted rebinned backprojection-filtration (wrBPF) algorithm in conjunction with a hybrid type scatter correction approach.
Methods:
The proposed method uses a beam-blocker array that provides partial data for scatter correction and image reconstruction and that only blocks the beam within a limited cone angle. This design allows a chance to keep the image quality at larger cone angles by use of data redundancy since the projection data corresponding to larger cone angles are not blocked. However, the scatter correction would not be straightforward. In order to correct for the scatter in the projections at larger cone angles, we propose a novel scatter correction method combining a measurement-based and a convolution-based method. We first estimated the scatter signal using a measurement-based method in the partially beam-blocked regions, and then optimized the fitting parameters of a convolution-kernel that can be used for scatter correction in the projections at larger cone angles. For image reconstruction, we developed a wrBPF with butterfly filtering. We have conducted an experimental study to validate the proposed algorithm for image reconstruction and scatter correction.
Results:
The experimental results revealed that the developed reconstruction method makes full use of the benefits of partial beam-blocking for scatter correction and image reconstruction and at the same time enhances image quality at larger cone angles by use of an optimized convolution-based scatter correction.
Conclusions:
The proposed method that enjoys the advantages of both measurement-based and convolution-based methods for scatter correction has successfully demonstrated its capability of reconstructing accurate images out of a single scan in circular CBCT.
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