A high resolution extreme ultraviolet spectrometer system optimized for harmonic spectroscopy and XUV beam analysis.

Martin Wünsche1, Silvio Fuchs1, Thomas Weber1

  • 1Institute of Optics and Quantum Electronics, Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743 Jena, Germany.

Summary

We developed a versatile extreme ultraviolet (XUV) spectrometer for broad spectral analysis. This high-resolution instrument enables detailed XUV beam inspection and imaging spectroscopy for advanced research.

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