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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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In situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array

V G Badami1, E Abruña1, L Huang2

  • 1Zygo Corporation, 21 Laurel Brook Road, Middlefield, Connecticut 06455, USA.

The Review of Scientific Instruments
|March 6, 2019
PubMed

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