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Scanning Electron Microscopy

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

A new Kirkpatrick-Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at

E Nazaretski¹, D S Coburn¹, W Xu¹

¹National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA.

Journal of Synchrotron Radiation

|September 8, 2022

Summary

A new scanning microscope was developed for advanced X-ray spectroscopy, achieving sub-200 nm resolution for 2D and 3D imaging. This instrument enhances materials analysis capabilities at the SRX beamline.

Keywords:

KB optics X-ray microscopy X-ray microscopy instrumentation

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$Studying Soft-matter and Biological Systems over a Wide Length-scale from Nanometer and Micrometer Sizes at the Small-angle Neutron Diffractometer KWS-2$

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Published on: June 19, 2018

Area of Science:

Materials Science
Nanotechnology
Spectroscopy

Background:

Advanced microscopy techniques are crucial for nanoscale materials characterization.
High-resolution X-ray spectromicroscopy enables detailed analysis of material composition and structure.
Existing instruments may have limitations in spatial resolution or dimensionality.

Purpose of the Study:

To report the development and commissioning of a novel scanning microscope.
To achieve sub-200 nm spatial resolution for 2D and 3D spectromicroscopy.
To detail the design, optical components, and sample stage of the new instrument.

Main Methods:

Installation of a new scanning microscope at the 5-ID Submicron Resolution X-ray Spectroscopy (SRX) beamline.
Utilizing Kirkpatrick-Baez mirrors for precise X-ray focusing.
Implementing a specialized sample scanning stage for high-resolution measurements.

Main Results:

Successful development and construction of the scanning microscope.
Demonstration of sub-200 nm spatial resolution capabilities.
Initial commissioning results validating the instrument's performance.

Conclusions:

The new scanning microscope is operational at the SRX beamline.
The instrument is capable of high-resolution 2D and 3D spectromicroscopy.
This development advances nanoscale materials analysis using X-ray spectroscopy.