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Identification and Compensation of Dynamic Interaction in a Non-Contact Dual-Stage Actuator System

Shaokai Wang1,2, Jinxin Hu3,4, Changqi Li5,6

  • 1Centre of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China. wangsk@hit.edu.cn.

Sensors (Basel, Switzerland)
|March 6, 2019
PubMed

Keywords:
dual-stage actuator systemdynamic interactionforce feedforwardposition-dependent disturbance forcesvelocity-dependent disturbance forces

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