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Updated: Jan 28, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Published on: October 11, 2016

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Deep X-ray lithography system with a uniform and high-accuracy fabrication area established in beamline BL11 at

Masaya Takeuchi1, Akinobu Yamaguchi1, Yuichi Utsumi1

  • 1Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan.

Journal of Synchrotron Radiation
|March 12, 2019
PubMed

Keywords:
LIGA processdeep X-ray lithographymicrofabrication

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