Related Experiment Video
Updated: Jan 27, 2026

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
Published on: April 8, 2018
Nanocrystal-Embedded-Insulator (NEI) Ferroelectric FETs for Negative Capacitance Device and Non-Volatile Memory
Yue Peng1, Genquan Han2, Wenwu Xiao3
1State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi'an, 710071, China.
Abstract:
We report a novel nanocrystal-embedded-insulator (NEI) ferroelectric field-effect transistor (FeFET) with very thin unified-ferroelectric/dielectric (FE/DE) insulating layer, which is promising for low-voltage logic and non-volatile memory (NVM) applications. The ferroelectric nature of the NEI layers comprising orthorhombic ZrO2 nanocrystals embedded in amorphous Al2O3 is proved by polarization voltage measurements, piezoresponse force microscopy, and electrical measurements. The temperature dependent performance and endurance behavior of a NEI negative capacitance FET (NCFET) are investigated. A FeFET with 3.6 nm thick FE/DE achieves a memory window larger than 1 V, paving a pathway for ultimate scaling of FE thickness to enable three-dimensional FeFETs with very small fin pitch.
Related Concept Videos
Biasing of FET
In an N-channel JFET, the structure consists of N-type material forming the channel on a P-type substrate, with the...
Volatilization
Insulation Coordination
Conductors and Insulators
Most metals are conductors. Their atomic configuration is such that one or more electron(s) are loosely bound to the nucleus in each atom. Thus, a sea of mobile electrons are available in them, known as free electrons. Their easy...
Thermal Insulation in Masonry Walls
External insulation can be applied using an Exterior Insulation and Finish System (EIFS), which involves affixing panels of plastic foam to the wall and covering them with a polymeric stucco reinforced with glass fiber mesh....
Capacitors and Capacitance
When the conductors are two identical parallel plates, it is called a parallel plate capacitor. When battery terminals are...

