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Property Optimization of the Micro-Bolometer Array Designed by Associating Noise Equivalent Temperature Difference
1Department of Global Nanotechnology Development, National NanoFab Center, Daejeon, 34141, Republic of Korea.
Journal of Nanoscience and Nanotechnology
|April 28, 2019
Summary
This study optimizes micro-bolometer array performance by adjusting design parameters. A serpentine pattern effectively minimizes channel resistance and reduces flicker noise for improved micro-bolometer performance.
Area of Science:
- Micro-bolometer technology
- Semiconductor device physics
- Infrared imaging sensors
Background:
- Micro-bolometer arrays are crucial for infrared imaging.
- Optimizing performance requires balancing active area, channel resistance, and noise.
- Amorphous silicon active layers present challenges with high resistance and flicker noise.
Purpose of the Study:
- To optimize micro-bolometer array performance through design parameter adjustments.
- To minimize channel resistance while maintaining adequate absorption area.
- To reduce flicker noise in micro-bolometer circuits.
Main Methods:
- Investigated design parameters like active area and channel length.
- Utilized a serpentine pattern to enhance conductivity and absorption.
- Analyzed the impact of amorphous silicon's electrical properties on array performance.
Main Results:
- Demonstrated that a serpentine pattern efficiently minimizes channel resistance.
- Showed the serpentine pattern maintains a large absorption area within a given pixel size.
- Confirmed significant flicker noise reduction due to the optimized channel design.
Conclusions:
- Serpentine patterns are highly effective for micro-bolometer channel optimization.
- Design parameter tuning, particularly with serpentine structures, improves performance and reduces noise.
- This approach enhances micro-bolometer sensitivity and reliability without requiring additional dopants.
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