Related Experiment Video
Updated: Jan 25, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition
Weiwei Cao1,2,3, Bingli Zhu4, Xiaohong Bai4
1Key Laboratory of Ultrafast Photoelectric Diagnostic Technology, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an, 710119, China. caoweiwei@opt.ac.cn.
Abstract:
As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields. Pure aluminum oxide (Al2O3) as secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as high dark current and low lifetime which often occur on traditional MCP. In this paper, we systematically investigate the morphology, element distribution, and structure of samples by scanning electron microscopy (SEM) and energy disperse spectroscopy (EDS), respectively. Output current of different thickness of Al2O3 was studied and an optimal thickness was found. Experimental tests show that the average gain of ALD-MCP was nearly five times better than that of traditional MCP, and the ALD-MCP showed better sensitivity and longer lifetime.
Related Concept Videos
Half-life of a Reaction
Atomic Nuclei: Nuclear Relaxation Processes
Characteristics of Life
Atomic Structure
Atomic Mass
Atomic Orbitals

