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A piezoelectric deformable X-ray mirror for phase compensation based on global optimization.

Hui Jiang1, Naxi Tian2, Dongxu Liang1

  • 1Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Zhangheng Road 239, Pudong District, Shanghai 201204, People's Republic of China.

Journal of Synchrotron Radiation
|May 11, 2019
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Summary

Researchers developed a novel phase compensator for synchrotron hard X-ray nanoprobe microscopy, achieving precise wavefront control for sub-10nm focusing. This advancement enhances nanoscience investigations by improving mirror accuracy and reducing wavefront distortions.

Keywords:
figure erroriterative global optimizationphase compensationpiezoelectric deformable mirrorspeckle scanning metrology

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Area of Science:

  • Nanoscience
  • Optics
  • Materials Science

Background:

  • Synchrotron hard X-ray nanoprobe microscopy is crucial for nanoscience research.
  • Achieving a ∼10 nm focusing spot size requires advanced optical systems like Kirkpatrick-Baez mirrors.
  • Current polishing technologies limit mirror precision, necessitating wavefront compensation.

Purpose of the Study:

  • To develop and test a prototype phase compensator for wavefront distortion correction in nanoprobe systems.
  • To investigate factors influencing compensator performance, including piezoresponse, actuator configuration, stability, and hysteresis.
  • To demonstrate precise wavefront compensation for improved focusing capabilities.

Main Methods:

  • Finite-element analysis and Fizeau interferometer measurements to characterize the prototype.
  • Development of a global optimization method based on measured piezoresponse.
  • Speckle scanning technique to measure wavefront errors and assess compensation effectiveness.

Main Results:

  • The prototype phase compensator demonstrated precise wavefront compensation.
  • A global optimization method improved mirror figure accuracy to within several nanometers.
  • Residual figure error was reduced to a root-mean-square value of 0.7 nm after compensation.

Conclusions:

  • The developed phase compensator effectively corrects wavefront distortions in nanoprobe systems.
  • The global optimization method offers a superior approach for adjusting compact piezoelectric actuators.
  • This technology advances the capability of hard X-ray nanoprobe microscopy for nanoscale research.