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An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

Liang Zhou1, Xiaoyang Zhang2, Huikai Xie3

  • 1Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA. l.zhou@ufl.edu.

Micromachines
|May 17, 2019
PubMed

Keywords:
Cu/W bimorphMEMS mirrorelectrothermal actuationelectrothermal bimorphreliability

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