Dynamic Analysis of a Micro Beam-Based Tactile Sensor Actuated by Fringing Electrostatic Fields

A new kind of fringing electrostatic actuation mode is developed. In this new actuation mode, the expression of fringing electrostatic force is found. The nonlinear dynamic analysis of this new actuation mode is presented by using the Method of Multiple Scales. An experiment is designed to observe the dynamic behaviors of this structure. It is observed that the resonance frequency rises with the increase of the initial displacement and the decrease of the slit gap; a smaller slit gap makes marked change of the resonance frequency in the same range of the initial displacement; the increase of the vibration amplitude is linear with the increase of the initial displacement; the fringing electrostatic force has a larger impact on the frequency response of the nonlinear vibration when the initial displacement, the beam length and the actuated voltage are larger. This new fringing electrostatic actuation mode can be used in a micro tactile sensor. The results of dynamic analysis can provide support for sensor design. Based on the dynamic investigations into the micro cantilevered beam actuated by fringing electrostatic force; three usage patterns of the sensor are introduced as follows. Firstly, measuring resonance frequency of the micro beam can derive the initial displacement. Second, the initial displacement can be derived from vibration amplitude measurement. Third, jump phenomenon can be used to locate the initial displacement demand.