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Recommended practice for calibrating vacuum gauges of the ionization type
James A Fedchak1, Patrick J Abbott1, Jay H Hendricks1
1National Institute of Standards and Technology (NIST), Gaithersburg, MD 20899.
None:
This article represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.
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