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Updated: Jan 24, 2026

Polymeric Microneedle Array Fabrication by Photolithography
Published on: November 17, 2015
Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization.
Qiang Geng1, Dien Wang1, Pengfei Chen1
1Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong.
This study introduces a new laser nanofabrication method using two-photon polymerization (TPP) and a digital micromirror device (DMD) scanner. This parallel processing approach significantly increases fabrication speed for nanoscale 3D structures.
Area of Science:
- Materials Science
- Nanotechnology
- Photonics
Background:
- Two-photon polymerization (TPP) is a high-resolution 3D printing technique.
- Current TPP methods are slow due to serial laser scanning, limiting practical applications.
- High costs and slow fabrication rates restrict TPP to laboratory use.
Purpose of the Study:
- To develop a faster and more efficient laser nanofabrication process.
- To overcome the limitations of serial scanning in TPP.
- To enable large-scale nano-prototyping and fabrication of complex 3D nanostructures.
Main Methods:
- Utilized two-photon polymerization (TPP) combined with a digital micromirror device (DMD) scanner.
- Employed binary holography for simultaneous generation and control of multiple laser foci.
- Achieved parallel nanofabrication at a rate of 22.7 kHz.
Main Results:
- Successfully fabricated complex 3D structures, including trusses and woodpile designs.
- Demonstrated a resolution of approximately 500 nm.
- Enabled parallel fabrication of one to tens of laser foci simultaneously.
Conclusions:
- The novel TPP-DMD system offers a revolutionary approach to laser nanofabrication.
- This parallel processing capability significantly enhances fabrication rates.
- The technology has the potential for large-scale nano-prototyping and creating intricate structures, impacting nanomanufacturing.
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