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Updated: Jan 24, 2026

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Julian Menges1, Steffen Klingel2, Egbert Oesterschulze3
1Department of Mechanical and Process Engineering, Chair of Separation Science and Technology, TU Kaiserslautern, 67663 Kaiserslautern, Germany. julian.menges@mv.uni-kl.de.
Chemo-responsive hydrogels were precisely microstructured using direct laser writing (DLW) and integrated into microelectromechanical systems (MEMS). This demonstrates a novel method for creating advanced sensors with smart materials.
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