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Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth.

Faisal Iqbal1, Hussamud Din2, Byeungleul Lee3

  • 1Interdisciplinary Program in Creative Engineering, Korea University of Technology and Education 1600, Chungjeol-ro, Byeongcheon-myeon, Dongnam-gu, Cheonan-si, Chungcheongnam-do 31253, Korea. faisal@koreatech.ac.kr.

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|June 23, 2019
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Summary
This summary is machine-generated.

This study introduces a compact, highly sensitive single-drive multi-axis gyroscope. It achieves wide bandwidth, high linearity, and excellent performance across X, Y, and Z axes, suitable for various applications.

Keywords:
MEMSdynamic rangeinertial sensormulti-axis gyroscopesingle drivewide bandwidth

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Area of Science:

  • MEMS (Micro-Electro-Mechanical Systems)
  • Inertial Sensors
  • Sensor Technology

Background:

  • Gyroscopes are crucial for motion sensing in navigation and control systems.
  • Existing multi-axis gyroscopes often face limitations in size, sensitivity, or linearity.
  • Advancements in microfabrication enable the development of smaller, more capable inertial sensors.

Purpose of the Study:

  • To design, fabricate, and characterize a novel, highly sensitive, single-drive multi-axis gyroscope.
  • To achieve a wide bandwidth and high linearity across all three sensing axes (X, Y, Z).
  • To demonstrate a compact footprint suitable for integration into various platforms.

Main Methods:

  • Microfabrication of the gyroscope with a 30 µm structural thickness.
  • Wafer-level packaging at 100 mtorr.
  • Design and utilization of a custom printed circuit board (PCB) for performance evaluation.
  • Characterization of sensitivity, linearity, angle random walk, and bias stability.

Main Results:

  • The gyroscope exhibits high sensitivities of 12.56, 17.13, and 25.79 μV/dps for roll, pitch, and yaw axes, respectively.
  • Scale-factor non-linearity is below 0.2% (roll/pitch) and 0.001% (yaw) up to ±1500 deg/s.
  • Low angle random walk (1.42–2.79 dps/√Hz) and in-run bias stability (0.84–1.62 deg/s) were achieved.
  • The device boasts a small footprint of 1426 × 1426 µm².

Conclusions:

  • The fabricated single-drive multi-axis gyroscope demonstrates superior sensitivity, linearity, and a compact size.
  • The results confirm the potential of this gyroscope for high-performance motion sensing applications.
  • Wafer-level packaging and custom PCB design facilitate efficient characterization and potential mass production.