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A gyroscope is defined as a spinning disk in which the axis of rotation is free to assume any orientation. When spinning, the orientation of the spin axis is unaffected by the orientation of the body that encloses it. The body or vehicle enclosing the gyroscope can be moved from place to place, while the orientation of the spin axis remains the same. This makes gyroscopes very useful in navigation, especially where magnetic compasses cannot be used, such as in crewed and crewless spacecraft,...
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Updated: Oct 22, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope.

Hussamud Din1, Faisal Iqbal1, Byeungleul Lee1

  • 1School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan 31253, Korea.

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|August 27, 2021
PubMed
Summary
This summary is machine-generated.

This study introduces a novel ratio-matching method to significantly reduce cross-axis sensitivity (CAS) in microelectromechanical systems (MEMS) gyroscopes. The technique effectively minimizes unwanted signals, enhancing gyroscope accuracy and performance.

Keywords:
COMSOLcross-axis sensitivityfinite element analysis (FEA) modelgyroscopemicroelectromechanical systems (MEMS)multi-axissingle-drive

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Inertial Sensors
  • Sensor Design

Background:

  • Cross-axis sensitivity (CAS) is a critical performance limitation in microelectromechanical systems (MEMS) gyroscopes, affecting measurement accuracy.
  • Existing methods for CAS reduction often involve complex fabrication processes or limited effectiveness.

Purpose of the Study:

  • To present a new design technique, the "ratio-matching method," for estimating and reducing CAS in single-drive multi-axis MEMS gyroscopes.
  • To validate the proposed method through simulation and experimental verification.

Main Methods:

  • Analysis of a simplified single-drive multi-axis MEMS gyroscope using COMSOL Multiphysics.
  • Application of the "ratio-matching method" focusing on drive displacement amplitudes and sense frequency differences ratios.
  • Validation via simulation by varying coupling spring position and sense frequency difference, and experimental verification on fabricated devices.

Main Results:

  • Initial average CAS of 0.301% (x-axis: 0.482%, y-axis: 0.120%) was reduced to an average of 0.045% (x-axis: 0.018%, y-axis: 0.073%) using the ratio-matching method.
  • Achieved an 85.1% reduction in average CAS.
  • Demonstrated successful validation through simulations and experimental testing.

Conclusions:

  • The proposed "ratio-matching method" is an effective technique for significantly reducing cross-axis sensitivity in single-drive multi-axis MEMS gyroscopes.
  • This method offers a practical approach to enhance gyroscope performance and reliability.
  • The findings are supported by both simulation and experimental results, confirming the methodology's robustness.