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Sensing Sub-10 nm Wide Perturbations in Background Nanopatterns Using Optical Pseudoelectrodynamics Microscopy (OPEM)

Jinlong Zhu1, Yanan Liu2, Xin Yu1

  • 1Photonic Systems Laboratory, Department of Electrical and Computer Engineering , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States.

Nano Letters
|July 9, 2019
PubMed

Keywords:
Nanoscale sensingdefect inspectionelectrodynamicsnanotechnologyoptical microscopysemiconductors

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