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Updated: Jul 31, 2026

Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication
Published on: November 28, 2017
Two-Dimensional Lateral Epitaxy of 2H (MoSe2)-1T' (ReSe2) Phases
Amey Apte1, Aravind Krishnamoorthy2, Jordan A Hachtel3
1Department of Materials Science and NanoEngineering , Rice University , 6100 Main Street , Houston , Texas 77005 , United States.
Abstract:
Two-dimensional (2D) transition metal dichalcogenide (TMDC) heterostructures have been proposed as potential candidates for a variety of applications like quantum computing, neuromorphic computing, solar cells, and flexible field effective transistors. The 2D TMDC heterostructures at the present stage face difficulties being implemented in these applications because of lack of large and sharp heterostructure interfaces. Herein, we address this problem via a CVD technique to grow thermodynamically stable heterostructure of 2H/1T' MoSe2-ReSe2 using conventional transition metal phase diagrams as a reference. We demonstrate how the thermodynamics of mixing in the MoReSe2 system during CVD growth dictates the formation of atomically sharp interfaces between MoSe2 and ReSe2, which can be confirmed by high-resolution scanning transmission electron microscopy imaging, revealing zigzag selenium-terminated interface between the epitaxial 2H and 1T' lattices. Our work provides useful insights for understanding the stability of 2D heterostructures and interfaces between chemically, structurally, and electronically different phases.
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