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Characteristics of Metal-Metal Nano-Area Contact Resistance for Less Than 5 nm Technology Node

Eunmi Choi1, Yinhua Cui1, Yuan Gao1

  • 1School of Integrative Engineering, Chung-Ang University, Seoul, 06974, Korea.

Journal of Nanoscience and Nanotechnology
|August 7, 2019
PubMed

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