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A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
Published on: April 8, 2018
Fluid Imprint and Inertial Switching in Ferroelectric La:HfO2 Capacitors.
Pratyush Buragohain, Adam Erickson, Pamenas Kariuki1
1NaMLab gGmbH/TU Dresden , Noethnitzer Strasse 64 , Dresden 01187 , Germany.
Ferroelectric hafnium oxide (HfO2) thin films show significant imprint issues, impacting memory device reliability. Researchers identified a novel "fluid imprint" and "inertial switching" mechanism in La-doped HfO2, linked to charge trapping.
Area of Science:
- Materials Science
- Solid-State Physics
- Nanotechnology
Background:
- Ferroelectric (FE) HfO2-based thin films are promising for memory devices.
- Imprint, a shift in polarization-voltage (P-V) loops, causes device failure.
- Understanding imprint mechanisms in FE HfO2 is crucial for reliable applications.
Purpose of the Study:
- To investigate the imprint mechanism in La-doped HfO2 (La:HfO2) capacitors.
- To correlate macroscopic switching characteristics with domain behavior.
- To elucidate the origins of conventional and novel imprint phenomena.
Main Methods:
- Combined pulse switching technique with piezoresponse force microscopy (PFM).
- High-resolution domain imaging to observe time-voltage-dependent behavior.
- Analysis of P-V loops and domain structure evolution.
Main Results:
- La:HfO2 capacitors exhibit more pronounced imprint than Pb(Zr,Ti)O3-based FE capacitors.
- A novel 'fluid imprint' phenomenon, dependent on switching prehistory, was observed.
- 'Inertial switching' was visualized, showing polarization switching post-field removal, attributed to charge injection and trapping.
Conclusions:
- The study reveals a detailed understanding of imprint mechanisms in La:HfO2.
- Fluid imprint and inertial switching are significant factors affecting FE HfO2 reliability.
- Charge injection and trapping at defect sites are identified as the root cause of inertial switching.
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