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Smart CMOS mid-infrared sensor array.

Daniel Popa, Syed Zeeshan Ali, Richard Hopper

|August 30, 2019

Summary

This summary is machine-generated.

We developed a new single-chip thermopile sensor array for mid-infrared imaging. This low-cost, compact sensor offers high performance for applications like gesture recognition.

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Area of Science:

Materials Science
Electrical Engineering
Sensor Technology

Background:

Mid-infrared imaging requires compact, cost-effective sensors.
Existing thermopile arrays often face challenges with size and fabrication complexity.

Purpose of the Study:

To introduce a novel single-chip thermopile sensor array for mid-infrared room temperature imaging.
To demonstrate a compact and simplified fabrication process for thermopile arrays.

Main Methods:

Fabrication on a single complementary metal-oxide-semiconductor (CMOS) dielectric membrane.
Utilizing single-crystal silicon (Si) p+ and n+ elements.
Employing standard CMOS tungsten metal layers for cold junction heatsinking.

Main Results:

Demonstrated a 16x16 pixel device with 34 V/W responsivity.
Achieved enhanced optical absorption in the 8-14 μm waveband.
Sensor performance is suitable for gesture recognition and people-counting.

Conclusions:

The developed sensor array is simple, low-cost, and compact.
It offers attractive on-chip capabilities for mid-infrared applications.
The technology is well-suited for real-time imaging tasks.