MEMS-based self-referencing cascaded line-scan camera using single-pixel detectors

Area of Science:

• Optics and Photonics
• Microelectromechanical Systems (MEMS)
• Image Sensors

Background:

• Traditional line-scan cameras are limited by cost and wavelength operability.
• Single-pixel detectors offer a low-cost alternative for various spectral ranges.
• Cascading imaging units can increase spatial resolution.

Purpose of the Study:

• To propose and verify a MEMS-based self-referencing cascaded line-scan camera using single-pixel detectors.
• To demonstrate a low-cost, high-resolution imaging system.
• To enhance signal-to-noise ratio and simplify data acquisition.

Main Methods:

• Integration of imaging slit, MEMS encoding mask, light concentrator, and single-pixel detector in cascaded units.
• Utilizing Hadamard transform multiplexing detection for SNR enhancement.
• Employing a resonantly driven MEMS encoding mask for high frame rates.

Main Results:

• A prototype cascaded line-scan camera with two units, each resolving 71 spatial pixels.
• Achieved an ideal frame rate of 500 fps with potential for further increase.
• Demonstrated a self-referencing design simplifying open-loop operation.

Conclusions:

• The proposed MEMS cascaded line-scan camera is a viable low-cost, high-resolution imaging solution.
• The system offers flexibility in wavelength operation and improved SNR.
• The self-referencing design simplifies data acquisition and enables efficient operation.