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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Stewart A Koppell1, Marian Mankos2, Adam J Bowman1
1Physics Department, Stanford University, 382 Via Pueblo Mall, Stanford, CA 94305, USA.
Multi-pass transmission electron microscopy (MPTEM) reduces radiation damage to sensitive samples. This technique allows for fewer images to build 3D models in cryo-electron microscopy (cryo-EM), improving imaging of challenging specimens.
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