3D-Printed Scanning-Probe Microscopes with Integrated Optical Actuation and Read-Out.

Area of Science:

• Nanotechnology
• Surface Science
• Microscopy

Background:

• Scanning probe microscopy (SPM) is crucial for high-resolution surface imaging but is complex and expensive.
• Current SPM systems require delicate components and precise manual alignment.
• Existing methods limit accessibility and novel applications due to system complexity.

Purpose of the Study:

• To introduce a concept for ultra-compact SPM engines.
• To integrate essential SPM components into a single monolithic structure.
• To enable simpler, more accessible high-resolution surface imaging.

Main Methods:

• Fabrication using multiphoton laser lithography, an additive nanofabrication technique.
• Integration of cantilevers, tips, actuators, and read-out elements into one structure.
• Optical actuation and read-out, eliminating manual alignment.

Main Results:

• Demonstrated atomic-force microscopy (AFM) engines with atomic step height resolution.
• Successful operation of SPM engines in fluid environments.
• Development of 3D printed scanning near-field optical microscopy (SNOM) engines.
• Proof of concept for wafer-scale mass fabrication of SPM arrays.

Conclusions:

• The monolithic SPM engine concept significantly simplifies SPM system design and operation.
• This approach facilitates mass production and unlocks new applications.
• The technology offers a pathway to more accessible and versatile high-resolution surface analysis.