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Updated: Jan 1, 2026

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Coherence scanning interferometry with a focus-tunable lens.

Pavel Pavliček, Jonatan Kučera

    Applied Optics
    |December 25, 2019
    PubMed
    Summary

    This study introduces a novel optical measurement technique using coherence scanning interferometry without mechanical movement. The reference plane moves, enabling precise object shape measurement with an electrically focus-tunable lens.

    Area of Science:

    • Optical Metrology
    • Interferometry
    • Surface Characterization

    Background:

    • Coherence scanning interferometry (CSI) is a precise optical method for measuring object shapes.
    • CSI typically requires mechanical movement between the object and the measuring device.
    • This limitation restricts its application in certain scenarios.

    Purpose of the Study:

    • To develop a modified CSI method that eliminates the need for mechanical movement.
    • To enable high-precision surface measurements without relative object-device motion.
    • To overcome a key limitation of traditional coherence scanning interferometry.

    Main Methods:

    • Introduced a novel optical measurement approach based on coherence scanning interferometry.
    • Implemented a system where the reference plane moves instead of the object.

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  • Integrated an electrically focus-tunable lens into the imaging system.

    • Main Results:

    • Successfully demonstrated an optical measurement method that does not require mechanical movement between the object and the device.
    • The use of a moving reference plane and a focus-tunable lens allowed for precise imaging and measurement.
    • Achieved high-precision shape measurement without relative motion.

    Conclusions:

    • The proposed method offers a significant advancement in coherence scanning interferometry.
    • Eliminating mechanical movement broadens the applicability of CSI for object shape measurement.
    • This technique provides a new solution for non-contact, high-precision metrology.