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Photonic crystal slab edge directional coupler for deflection sensing.
Optics Express
|December 28, 2019
Summary
This study introduces a photonic crystal slab edge directional coupler (PCDC) for submicron deflection sensing. The PCDC acts as an optomechanical sensor, translating edge separation into measurable transmission changes.
Area of Science:
- Optoelectronics
- Nanophotonics
- Integrated Optics
Background:
- Photonic crystal slab edge directional couplers (PCDC) offer potential for micro-scale sensing applications.
- Existing methods for submicron deflection sensing face challenges in sensitivity and integration.
Purpose of the Study:
- To design, fabricate, and characterize a PCDC for submicron deflection sensing.
- To demonstrate the PCDC's capability as an intensity-based optomechanical sensor.
Main Methods:
- Fabrication of PCDC sensors using selective etching of silicon-on-insulator wafers.
- Transmission measurements to evaluate sensor performance and sensitivity.
- Analysis of dielectric modes between photonic crystal edges for directional coupling.
Main Results:
- Achieved low insertion loss and reduced coupling distances due to dielectric modes between photonic crystal edges.
- Quantified horizontal separation sensitivity of 1.6 %/nm at 1495 nm for a 24.3 µm PCDC.
- Calculated vertical separation sensitivity of 0.25 %/nm for a 12.6 µm PCDC.
Conclusions:
- The PCDC functions as an effective intensity-based optomechanical sensor for submicron deflection.
- The demonstrated PCDC sensors are compatible with broadband sources and reduce stiction probability.
- This technology advances high-sensitivity, integrated optical sensing solutions.

